Research Progress of Oxidation on Aluminium and Aluminium Nitride Films in Dry Atmosphere

The research progress and prospect of oxidation on aluminium and aluminium nitride films in dry atmosphere were reviewed.The effects of oxidation methods on the properties of different oxidation films were summarized.It is pointed out that thermal oxidation and multiplex component plasma oxidation for producing aluminium oxide films or aluminium oxynitride films would be a new direction of the development for aluminium oxidation technology.