Parameter optimization of optically excited microresonator by a semiconductor laser subject to optical feedback

A novel approach of optically exciting and detecting the vibration of a microresonator by a sinusoidally driven semiconductor laser subject to optical feedback is proposed. A theoretical model for the approach is established, and the working parameters are optimized. In our experiments, an Al-coated microcantilever is designed with optimized working parameters, and the microcantilever is optically excited by a sinusoidally driven semiconductor laser. We have demonstrated that there exist periodic dips of the optical power of semiconductor laser, which is caused by the resonant vibration of microcantilever. The optical power of semiconductor laser is also analyzed theoretically by using L-K equations. The experimental result is consistent with the result of theoretical analysis.