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Acoustic Emission Sensors using Silicon Mechanical Resonators
Acoustic Emission Sensors using Silicon Mechanical Resonators
2015
Kengo Takata
Takashi Sasaki
Mitsutomo Nishizawa
Hiroshi Saito
Shinsuke Yamazaki
Daisuke Matsuura
Kazuhiro Hane
Keywords:
Q factor
Electronic engineering
Engineering
Acoustic emission
Resonator
Optoelectronics
Silicon
Correction
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