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A mechanically optimized stable and accurate on-wafer tuner setup
A mechanically optimized stable and accurate on-wafer tuner setup
2004
C. Tsironis
V. Ducamp
V. Mallette
R. Meierer
Keywords:
Electronic engineering
Noise measurement
Engineering
Electrical impedance
Wafer
Control engineering
Tuner
velocity measurement
size measurement
Correction
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