Development And Evaluation Of CoSi2 Schottky Barrier Infrared Detectors

Silicides used commonly for Schottky barrier infrared (IR) imaging arrays, are those of platinum and palladium. Recently good results have also been reported for IR sensitive composed Pt-Ir silicides. The uniformity of the response over large detector arrays and the VLSI fabrication compatibility are their main advantages, as compared to non Schottky type detectors. This paper presents theoretical as well as experimental data on the cobalt silicide as used in Schottky detectors for the short wavelength IR (SWIR) band. The big advantage of a CoSi2 detector, over the conventionally used silicides, is its higher operating temperature allowing passive cooling in space remote sensing applications.