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Incident angle dependence of O2 cluster ions on Ta2O5 thin film properties
Incident angle dependence of O2 cluster ions on Ta2O5 thin film properties
2003
Sozo Inoue
Y. Fujiwara
Noriaki Toyoda
Ichiro Yamada
H. Tsubakino
Keywords:
Ion beam
Surface roughness
Thin film
Materials science
Optics
Ion
Angle of incidence
Ceramic materials
Correction
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