Online Optimization Control with Predictive Gradient Descent for MEMS Micro-mirrors

2021 
In this paper, an online optimization control (OPC) scheme is proposed for the angle control of MEMS scanning micro-mirror actuated via electromagnetic method. In order to avoid complicated process of building precise model of the MEMS micro-mirror, a control structure not relying on precise model is developed. In this structure, a simplified linear dynamic model is used to describe the basic dynamic behavior of the micro-mirror. Then, a model error compensation mechanism (MECM) is introduced to compensate for the model uncertainty caused by un-modelled dynamics and nonlinear factors, such as hysteresis. Moreover, a predictive gradient descent (PGD) based optimization mechanism is proposed to compensate the effect of time-delay and speed up the convergence of on-line optimization process. Then, the stability analysis of the proposed control system is implemented. Finally, the proposed control scheme is applied to the angle control of electromagnetically driven scanning micro-mirror (EDSMM) and the corresponding experimental results are presented.
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