Monte Carlo Simulation Program with a Free Configuration of Specimen and Detector Geometries

A FORTRAN 77 program package has been developed for the Monte Carlo simulation of electron trajectories and of secondary electrons (SE), backscattered electrons (BSE) and X-ray linescans for scanning electron microscopy and microanalysis. A data base contains the relativistic elastic Mott crosssections of all elements, the X-ray absorption coefficients, and the most relevant ionisation and characteristic X-ray energies.