Ceramic oxide coating via RF plasma aerosol mist deposition technique at atmospheric pressure

Indium tin oxide coatings and yttria stabilized zirconia thin films were fabricated using an RF plasma aerosol mist deposition process. This atmospheric deposition process has advantages over vacuum techniques, which include large-scale production capability, reduced operation and maintenance costs, and simplicity of operation. Films comprised of nano-sized crystallites have been formed using this deposition process. Material properties and characteristics including film density, thickness, and crystallite size can be controlled. Transparent, conductive indium-tin oxide coatings on soda-lime-silicate float glass have been produced with thicknesses ranging from 300--500 nm. Applications for this type of coating include electrochromic windows for reflecting long-wave IR heat rays, while transmitting light, as well as resistive heaters for defrosting car windows. Yttria stabilized zirconia thin films were also produced for use in solid oxide fuel cells. Characterization and material property studies of these coatings and films were performed by XRD, EDS, SEM, resistivity measurements, UV-Vis-IR transmission/reflection, attenuated total reflectance (ATR) infrared spectra, and diffuse reflectance infrared fourier transform (DRIFT) spectra.