Electrochemical Einebnungssystem with improved electrolyte flow

A polishing pad for an electrochemical planarization tool comprises a textured surface that forms suitable electrolyte flow channels to direct an electrolyte from the center to the edge. Consequently, a continuous electrolyte flow can be established, whereby the accumulation of contaminants in the polishing pad is significantly reduced, resulting in improved process uniformity, so that frequent purging of the polishing pad and the replacement of the electrolyte solution can be avoided.