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Performance of a Focused-Ion-Beam Implanter with Tilt-Writing Function : Beam Induced Physics and Chemistry
Performance of a Focused-Ion-Beam Implanter with Tilt-Writing Function : Beam Induced Physics and Chemistry
1989
H. Sawaragi
Hironobu Manabe
H. Kasahara
Ryoso Aihara
Kazuo Nakamura
Fumiyuki Nihei
Yukinori Ochiai
Shinji Matsui
Tadatoshi Nozaki
Keywords:
Ion beam
Writing (function)
Beam (structure)
Focused ion beam
Optics
Physics
ion channeling
Correction
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