Old Web
English
Sign In
Acemap
>
Paper
>
Growth of SiGeSn thin films using simplified PECVD reactor towards NIR sensor devices
Growth of SiGeSn thin films using simplified PECVD reactor towards NIR sensor devices
2020
Jignesh Vanjaria
Arul Chakkaravarthi Arjunan
Thomas Salagaj
Gary S. Tompa
Haokai Yang
Todd Houghton
Hongbin Yu
Keywords:
Thin film
Optoelectronics
Plasma-enhanced chemical vapor deposition
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
39
References
1
Citations
NaN
KQI
[]