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Phonon lithography enabling fabrication of superior high-resolution electrical contacts on 1D and 2D materials
Phonon lithography enabling fabrication of superior high-resolution electrical contacts on 1D and 2D materials
2021
Felix Holzner
Heidelberg Instruments Nano SwissLitho
Keywords:
Materials science
Optoelectronics
Electrical contacts
Fabrication
high resolution
Phonon
Lithography
Correction
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