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Surface-micromachined PbTiO 3 pyroelectric detectors
Surface-micromachined PbTiO 3 pyroelectric detectors
1991
Dennis L. Polla
C. Ye
Takashi Tamagawa
Keywords:
Optoelectronics
Materials science
Micromechanics
solid surface
pyroelectric detectors
Thin film
CMOS
Pyroelectricity
Correction
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