Fabrication and Evaluation of a Multilayer Laminar‐Type Holographic Grating and Its Application to a High Efficiency Grazing Incidence Monochromator for the 1–8 keV Region

A W/C multilayer laminar‐type holographic grating was fabricated and its diffraction efficiency was evaluated in the 1–8 keV region. Taking advantage of its high diffraction efficiency a monochromator equipped with a multilayer varied‐line‐spacing plane grating was designed. The throughput of the monochromator based on the experimental diffraction efficiency of the multilayer grating and resolving power were calculated in comparison with those of a monochromator equipped with a Au coated grating.