High resolution tunnel junction extreme ultraviolet detectors limited by quasiparticle counting statistics

Superconducting tunnel junctions (STJs) can be used as high-resolution high-count rate photon detectors. They are based on the measurement of the excess quasiparticle tunneling current caused by the absorption of a photon in one of the junction electrodes. We have fabricated Nb-Al-AlO/sub x/-Al-Nb tunnel junction detectors with different sizes and characterized them in synchrotron experiments. We present a study of the detector performance in the energy band between 50 and 1000 eV. For photon energies below 70 eV, the intrinsic device resolution of the best STJ devices agrees with the theoretical limit set by the statistics of the charge generation and tunneling processes.