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Effect of Silicon Wafer In-Situ Cleaning on the Structure of Ultrathin Silicon Oxide Films
Effect of Silicon Wafer In-Situ Cleaning on the Structure of Ultrathin Silicon Oxide Films
1991
Naozumi Terada
Hiroki Ogawa
Kazunori Moriki
Akinobu Teramoto
K. Makihara
Mizuho Morita
Tadahiro Ohmi
Takeo Hattori
Keywords:
Nanotechnology
Hybrid silicon laser
Wafer
Silicon oxide
Materials science
Composite material
In situ
Correction
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