Surface Wave Technique at Millimeter Waveband for Semiconductor Testing by Photoexcitation
2019
A new surface wave technique at millimeter waveband 53-225GHz has been developed for non-contact, non-destructive testing of semiconductors using photoexcitation. Both positive and negative signal polarities are observed for semiconductor samples and metal-semiconductor structures. The scheme of experimental setup is presented. Preliminary experimental results are illustrated and discussed.
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