Recent progress on laser fabrication of on-chip microsupercapacitors

Abstract Laser direct writing technique has demonstrated its potentiality in producing high performance microsupercapacitors via beam scanning, which processes and patterns active substance simultaneously to form electrode features with high spatial resolution and accuracy. This method can process carbon, graphene and derived materials, and polymer to construct 3D porous graphene, hierarchical porous frames, and nanostructures with a precisely controlled porosity. This facilitates the absorption, penetration, and transport of electrolyte ions, which directly lead to a high electrochemical performance for energy storage application. Laser reduction of graphene oxide, carbonization of non-graphite material, and micromachining are three fundamental operations of laser direct writing fabrication, and were studied extensively during the past decade. This project reviews the achievements of laser fabricated microsupercapacitors with focusing on the laser treating mechanism and strategy for increasing performance of produced device. Recent advances about the laser processing mechanism, optimizing parameters, and developing new substance are reviewed and summarized according to their different categories and applications. In the end, difficulties of laser direct writing technique and possible solutions to improve resolution, accuracy, and precision of produced features were also discussed.