Large flow rate/high frequency microvalve array for high performance actuators

Abstract This paper presents fabrication, testing, and analysis of a large flow rate microvalve array. The array consists of 88-microvalves fabricated on a silicon-on-insulator (SOI) substrate. The SOI wafer simplifies the fabrication process and eliminates the need for multi-layer surface micromachining process and bulk wafer-bonding procedures. The analytical resonant frequency of the valve is up to 50 kHz and operates at high delta pressures (i.e. 0.14 MPa). The microvalves are fabricated with various flap widths ranging from 300 to 400 μm and flap thickness ranging from 10 to 13 μm. The results indicate that, in terms of geometrical designs, flap displacement and flow rate are strongly dependent on flap thicknesses and to a lesser degree on flap widths. The resonance frequency increases as valve flap thickness increases and width decreases. Comparison between predicted and measured flow rate shows good agreement. A flow rate up to 35 cm 3 /s was measured. A failure criterion is also presented using the fracture stress analysis and shows good agreement with experimental result.