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Evaluation of CMP surface quality for high reliabilities of SiC devices
Evaluation of CMP surface quality for high reliabilities of SiC devices
2018
Shinya Hirano
Keiichi Yamada
Akira Miyasaka
Susumu Tsukimoto
Keiko Masumoto
Junji Senzaki
Kenji Kawata
Tomohisa Kato
Hajime Okumura
Keywords:
Silicon carbide
Chemical-mechanical planarization
Composite material
Materials science
Metallurgy
Correction
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