Crystallization processing for semiconductor use

PROBLEM TO BE SOLVED: To provide a method for reorganizing a structure of a solid material by exposing the solid material to pulses of energy to progressively melt the solid material, forming a molten material, and recrystallizing the molten material.SOLUTION: A substrate processing method includes the steps of: distinguishing a processing zone of a substrate; melting a part of the processing zone by each pulse of a plurality of first laser pulses and sending out the plurality of first laser pulses, in which a period between respective pulses of the plurality of first laser pulses is shorter than time required to solidify a part of the molten processing zone, to the processing zone; and melting a part of the processing zone by each pulse of a plurality of second laser pulses and sending out the plurality of second laser pulses, in which the period between the respective pulses of the plurality of second laser pulses is longer than time required to solidify a part of the molten processing zone, to the processing zone of the substrate.SELECTED DRAWING: Figure 1B