Deflection of a viscoelastic cantilever under a uniform surface stress: Applications to static-mode microcantilever sensors undergoing adsorption

The equation governing the curvature of a viscoelastic microcantilever beam loaded with a uniform surface stress is derived. The present model is applicable to static-mode microcantilever sensors made with a rigid polymer, such as SU-8. An analytical solution to the differential equation governing the curvature is given for a specific surface stress representing adsorption of analyte onto the viscoelastic beam’s surface. The solution for the bending of the microcantilever shows that, in many cases, the use of Stoney’s equation to analyze stress-induced deflection of viscoelastic microcantilevers (in the present case due to surface analyte adsorption) can lead to poor predictions of the beam’s response. It is shown that using a viscoelastic substrate can greatly increase sensitivity (due to a lower modulus), but at the cost of a longer response time due to viscoelastic creep in the microcantilever. In addition, the effects of a coating on the cantilever are considered. By defining effective moduli for the ...