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Time and thickness dependence of crystallization of amorphous magnetron deposited TiO2thin films
Time and thickness dependence of crystallization of amorphous magnetron deposited TiO2thin films
2009
L. Nichtová
R. Kuzel
Z. Matěj
J. Šícha
J. Musil
Keywords:
Amorphous solid
Thin film
Crystallization
Cavity magnetron
Carbon film
Materials science
Composite material
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