CHARACTERISTICS OF Y1-xCaxBa2Cu3O7-δ THIN FILMS GROWN BY DC MAGNETRON SPUTTERING

Epitaxial Y1-xCaxBa2Cu3O7-δ thin films were successfully prepared by dc magnetron sputtering. The optimal deposition condition was determined. We find that the superconducting transition temperature Tc of thin films can be easily adjusted by annealing them in oxygen atmosphere with different pressures. Parabola curves are found for both Tc versus carrier concentration and Tc versus annealing pressure relations.