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Plasma assisted chemical vapour deposition of boron nitride coatings from using BCl 3–N 2–H 2–Ar gas mixture
Plasma assisted chemical vapour deposition of boron nitride coatings from using BCl 3–N 2–H 2–Ar gas mixture
1999
Fabio Rossi
Claire Schaffnit
Lynda Ann Thomas
H. Del Puppo
Robert Hugon
Keywords:
Chemical vapor deposition
Microstructure
Analytical chemistry
Chemistry
Scanning electron microscope
Plasma
Boron nitride
Fourier transform infrared spectroscopy
Mass spectrometry
Nitride
Correction
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