The microfluidic valve, microfluidic pump microfluidic system and a manufacturing method

The invention relates to a microfluidic valve, a microfluidic pump, a microfluidic system and a method for their preparation. A microfluidic valve comprising: a Aktuationselement with at least one actuator, a Druchfluselement with at least one flow passage, a membrane holder having a membrane holder top which is connected to the Aktuationselement, a membrane holder base, which is connected to the throughflow member, at least one diaphragm holder opening and at least one aktuierbaren, resilient, in particular elastically deformable , membrane, which in said at least one membrane holder opening is arranged, wherein a membrane with a membrane bottom with the diameter D echanical is contacted so that the at least one flow channel is substantially completely closed by the membrane.