ABSOLUTE COVERAGE MEASUREMENT OF A NACL LAYER ON INP(001) USING SPIX

Abstract The absolute coverage of chlorine on an InP(001) substrate has been determined by a measurement of the Cl K X-ray yield produced by 1.8 MeV 4 He + ions incident on an evaporated NaCl thin film of thickness 6.3 nm. A novel experimental geometry has been employed wherein the emitted X-rays are detected at grazing exit angles with respect to the target surface. In this configuration, the intensities of all substrate X-rays (P K, In L and bremsstrahlung) are reduced by a factor of ∼ 60 when the exciting beam is axially channeled along the 〈011〉 crystallographic direction.