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Fabrication of Si/SiGe 0.3 nano wire using Bio-template Ultimate Top-down Process and Its Thermal conductivity
Fabrication of Si/SiGe 0.3 nano wire using Bio-template Ultimate Top-down Process and Its Thermal conductivity
2017
Akiou Kikuchi
Akifumi Yao
Atsushi Yamamoto
Takahito Ono
Seiji Samukawa
Keywords:
Nanowire
Thermal conductivity
Composite material
Materials science
Optoelectronics
Fabrication
Correction
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