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An apparatus for plasma vapor deposition
An apparatus for plasma vapor deposition
1984
Masaru Yasui
Kazuaki Hokoda
Makoto Yoshida
Keywords:
Ion plating
Hybrid physical-chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Chemical vapor deposition
Combustion chemical vapor deposition
Plasma processing
Electron beam physical vapor deposition
Analytical chemistry
Pulsed laser deposition
Materials science
Chemical engineering
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