Ion optical device and the mass spectrometer

And a mass spectrometer ion optical device according to the present invention provided, comprising: at least one planar insulating substrate, covering the metal pattern to form the electrode array comprises a plurality of unit electrodes, each of the unit electrodes arranged in a geometric pattern of distribution of the electrode array according to a first direction; adjacent unit electrodes insulated from each other and applied with different phases of the RF voltage to the ion to be bound; electrode array means is at least partially generated between the electrodes applied with the direct voltage difference, driving the ion incident field along the electrode array as a first array of electrodes direction; distribution forming an electric field distribution corresponding to each incident ion driven along a second direction substantially orthogonal to the first direction to effect ion deflector, focusing or defocusing, by the geometry of the electrodes and the plane through the distribution of the geometric patterns the space required for the various electric field distribution; in the realization, using PCB or printed MEMS process the various elements of planar geometry electrodes, low cost, precision, flexibility and so on.