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Investigation on the interaction of long duration Nd:YAG laser pulse with Sn plasma for an EUV metrology source
Investigation on the interaction of long duration Nd:YAG laser pulse with Sn plasma for an EUV metrology source
2011
Y Tao
S. Yuspeh
R. Burdt
Mark S. Tillack
Farrokh Najmabadi
Y Ueno
Keywords:
Metrology
Materials science
short duration
Pulse (signal processing)
Optics
Plasma
Nd:YAG laser
Extreme ultraviolet lithography
Correction
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