A Study of the Behavior of SE and BSE in UltraLow Landing Voltage Condition

In the study, we set our motivation to consider the mechanism to explain such an interesting phenomena particularly happened at the ultra low voltage situation. At first we gathered a set of SE and BSE images simultaneously at ultra low voltage condition from various kinds of specimen. Second, we compared the SE and BSE image to investigate the difference. A simulation results by CASINO [3] was also applied for the theoretical consideration. In the study the recent cold FE-SEM (Hitachi SU8000) is used. The SEM is offering the SE/BSE filtering capability even at ultra low voltage condition as shown in Fig.1.