Thin-film SnO 2 and ZnO detectors of hydrogen peroxide vapors

Abstract. Thin-film hydrogen peroxide vapor sensors made from Co-doped SnO 2 and La-doped ZnO were manufactured using the high-frequency magnetron sputtering method. Thicknesses of deposited doped metal oxide films were measured and their morphology was investigated. The gas sensing characteristics of the prepared sensors were measured at different concentrations of hydrogen peroxide vapors and different operating temperatures of the sensor. It was found that both sensors made from doped metal oxides SnO 2 and ZnO exhibit a sufficient response to 10 ppm of hydrogen peroxide vapors at the 200 and 220 ∘ C operating temperature, respectively. It was established that the dependencies of the response on hydrogen peroxide vapor concentration have a linear character for prepared structures at the 150 ∘ C operating temperature and can be used for determination of hydrogen peroxide vapor concentration.