Micro three-dimensional sensing device based on laser interference fringes

2013 
The invention discloses a micro three-dimensional sensing device based on laser interference fringes. The micro three-dimensional sensing device comprises a laser, a first convex lens, a second convex lens, a beam splitter, a third convex lens, a charge coupled device (CCD) camera and a microcomputer; the first convex lens and the second convex lens are placed between the laser and the beam splitter, the laser is located at the position of a focal distance of the first convex lens, and the first convex lens is located at the position of a focal distance of the second convex lens; the third convex lens is located between a measured object and the CCD camera, the measure object is located in front of the third convex lens, and a sensor light-sensitive surface of the CCD camera is located at the position of an image surface of the third convex lens; and the microcomputer is in signal connection with a CCD camera head. According to the micro three-dimensional sensing device, the high-frequency laser interference fringes are used as projection raster, the resolution ratio is much higher than that of a measurement system based on digital projection technologies, and surface structure measurement of small objects can be achieved. Frequency of the projection raster can be adjusted by adjusting angles of incident light beams and the beam splitter, and the device is convenient to operate.
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