Seed crystal resonator phonon vibration mode selection method
2015
The present invention provides a method for the crystal resonator phonon vibration mode selection, the step comprising: performing modal analysis with piezoelectric material in a finite element software, the upper and lower electrodes in place of the short-circuit boundary conditions, the surface of the target pattern to obtain charge distribution; statistics were surface positive and negative charge integration, the absolute value is larger electrode area is disposed; electrode arrangement area and the lead has been transferred to the surface is sputtered phononic crystal structure of the piezoelectric material and connected to a peripheral circuit fixed. Methods phononic crystal resonator according to the present invention is a vibration mode selection compared to conventional excitation IDT, it is possible to reduce the insertion loss and enhance the response of the resonator mode, increasing the freedom of mode selection; broader scope of application, It may also be used for other resonator structure and in addition to compensate for different temperature modes of application background and having a complex piezoelectric transducer based mode.
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