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Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition
Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition
2015
William A. Kimes
Brent A. Sperling
James E. Maslar
Keywords:
Physics
Thermal
Nuclear magnetic resonance
Modular design
Atomic layer deposition
Infrared
Absorption (pharmacology)
Optoelectronics
Materials science
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