Simulation of radiation effects in ultra-thin insulating layers
2013
The Monte Carlo simulations of charged particle transport are used to
investigate the effects of exposing ultra-thin layers of insulators (commonly
used in integrated circuits) to beams of protons, alpha particles and heavy
ions. Materials considered include silicon dioxide, aluminum nitride,
alumina, and polycarbonate - lexan. The parameters that have been varied in
simulations include the energy of incident charged particles and insulating
layer thickness. Materials are compared according to both ionizing and
non-ionizing effects produced by the passage of radiation. [Projekat
Ministarstva nauke Republike Srbije, br. 171007]
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