Preparation and characterization of MOCVD thin films of indium tin oxide
1999
Abstract Indium Tin Oxide (ITO) was deposited by pyrolysis of mixed metal acetylacetonate (a single solid-source precursor). This study demonstrates that the properties of the as-deposited film depend on the deposition temperature. Films with a resistivity of 7.2×10 −4 Ω cm , a visible transmission of over 80%, and a direct optical energy gap of 3.76 eV were deposited.
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