Simulation Study of Material Deformation in Monocrystal Silicon Nano-Machining

Molecular dynamics simulations method is used on the study of material deformation in monocrystal silicon during nanomachining. Both nanoindentation and nanocutting by a diamond tool tip is investigated using LAMMPS. Characterization methods such as coordination number and labeling atoms in different layers have been adopted to study the law of transformation. As the surface atoms are tracked, their transformation law is analyzed and the formation mechanism of the cuttings and finished surface is announced. The impact crystal orientation of silicon on the machining is also studied.