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Chemical changes in hybrid photoresists before and after exposure by in situ NEXAFS analysis
Chemical changes in hybrid photoresists before and after exposure by in situ NEXAFS analysis
2017
Roberto Fallica
Benjamin R. Watts
Gioia Della Giustina
Laura Brigo
Giovanna Brusatin
Yasin Ekinci
Keywords:
XANES
Photochemistry
Materials science
In situ
Correction
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