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Characteristics of copper electrodeposits on featureless substrates and in microvias with aspect ratio up to 10
Characteristics of copper electrodeposits on featureless substrates and in microvias with aspect ratio up to 10
2009
Ole Lühn
Alex Radisic
Philippe M. Vereecken
Chris Van Hoof
Wouter Ruythooren
Jean-Pierre Celis
Keywords:
Copper
Metallurgy
Materials science
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