Micro toluene gas sensor of SWNTs-PtO x system using the vacuum filtering deposition method

Toluene() gas sensors were fabricated using loaded with SWNTs by a new deposition method. The nanoparticle powders of SWNTs- composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against toluene gas which is a kind of the Volatile Organic Compounds. The composition ratio that exhibited the highest response to toluene gases was SWNTs : $PtO_x\;