Optimal and robust design of a MEMS gyroscope based on sensitivity analysis and worst-case tolerance
2009
This paper reports on an efficient robust optimal design of MEMS gyroscope. Proposed method uses sensitivity analysis considering the worst-case tolerance instead of statistical information about uncertainties. The robust optimal models based on macromodels consider electro-mechanical couple-field analysis. Monte Carlo analysis and physical level verification are also studied.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
9
References
2
Citations
NaN
KQI