A MICRO-FLUORESCENT/DIFFRACTED X-RAY SPECTROMETER WITH A MICRO-X-RAY BEAM FORMED BY A FINE GLASS CAPILLARY

The technique of forming a micro‐x‐ray beam with a fine capillary was studied. It was shown that lightweight materials, such as glass, were suitable for the capillary in terms of their x‐ray refractive indexes. A fine glass capillary with a parabolic cross‐sectional inner wall surface was made. Using the capillary, a fluorescent and diffracted x‐ray spectrometer with a 0.8‐μm‐φ x‐ray beam was developed for the analysis of stress, crystal structure, and metal contamination in micro regions of ultra‐large‐scale integration (ULSI) devices. A micro‐focus x‐ray generator with a membrane‐type target was also developed for use with the capillary. The crystal phases of very thin Ti‐silicide fine lines and the strain in Al interconnections of ULSIs were analyzed using the equipment.