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Ion Energy Distribution Measurements of Low-energy Ion Beams Extracted from a Hot Cathode DC Ion Source
Ion Energy Distribution Measurements of Low-energy Ion Beams Extracted from a Hot Cathode DC Ion Source
2011
M. Vasquez
T. Kasuya
S. Maeno
M. Wada
Keywords:
Ion beam
Ion gun
Secondary ion mass spectrometry
Atomic physics
Analytical chemistry
Space charge
Ion beam deposition
Ion
Hot cathode
Chemistry
Ion source
Materials science
Correction
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