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15‐3: Resistance Reduction of Mo Metallization by W Seed Layer
15‐3: Resistance Reduction of Mo Metallization by W Seed Layer
2020
Harald Köstenbauer
Hennrik Schmidt
Dominik Lorenz
Christian Linke
Ying Zhang
Chengyuan Dong
Joerg Winkler
Keywords:
Metallurgy
Materials science
Correction
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