Improved device with a field mirror for optically inspecting a surface of
2008
Device for the optical testing of an examination region (3) a specular or diffuse reflecting surface (2) of an object (1), • with a field mirror (4) which reflects an on the surface (2) standing perpendicular light beam having a beam axis (5) in a light beam having a beam axis (5 ') to a reflection angle α (9) and to be examined whose projection on the surface (2) the examination region (3) at least just covered, • with at least one on the optical axis (7) of the illumination beam path in the area of the focal plane (20) of the field mirror (4) arranged light source (21) for bright field illumination, which on the examination zone by means of a telecentric beam path (3) is imaged, • with at least one outside the optical axis (7) of the illumination beam path in the area of the focal plane (20) of the field mirror (4) arranged light source (22, 22 ') for near-axis dark-field illumination, • with an electronic camera (11) with lens, the entrance pupil (13) in the focal plane (10) of the field mirror (4) on the camera-side optical ...
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