Improved device with a field mirror for optically inspecting a surface of

2008 
Device for the optical testing of an examination region (3) a specular or diffuse reflecting surface (2) of an object (1), • with a field mirror (4) which reflects an on the surface (2) standing perpendicular light beam having a beam axis (5) in a light beam having a beam axis (5 ') to a reflection angle α (9) and to be examined whose projection on the surface (2) the examination region (3) at least just covered, • with at least one on the optical axis (7) of the illumination beam path in the area of ​​the focal plane (20) of the field mirror (4) arranged light source (21) for bright field illumination, which on the examination zone by means of a telecentric beam path (3) is imaged, • with at least one outside the optical axis (7) of the illumination beam path in the area of ​​the focal plane (20) of the field mirror (4) arranged light source (22, 22 ') for near-axis dark-field illumination, • with an electronic camera (11) with lens, the entrance pupil (13) in the focal plane (10) of the field mirror (4) on the camera-side optical ...
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