3D PSF Measurement for a Soft X-ray Microscope and Comparison to Theory

James G. McNally,Stefan Rehbein,Christoph Pratsch,Stephan Werner,Peter Guttmann,Gerd Schneider

3D PSF Measurement for a Soft X-ray Microscope and Comparison to Theory

2016

James G. McNally
Stefan Rehbein
Christoph Pratsch
Stephan Werner
Peter Guttmann
Gerd Schneider

The transmission X-ray microscope’s 3D PSF exhibits an axial asymmetry that cannot be explained by an incoherent imaging model for either a lens or zone plate, with or without spherical aberration.

Keywords:

Spherical aberration
Image restoration
X-ray microscope
Zone plate
Microscope
Analytical chemistry
Optics
Physics
Asymmetry
Soft X-rays
three dimensional measurement
soft x ray

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