Titanium-based coatings on copper by chemical vapor deposition in fluidized bed reactors

Abstract Titanium, TiN and TiO x coatings were deposited on copper and Cu-Ni alloys by chemical vapor deposition in fluidized bed reactors. These coatings provide the copper with a tenfold increase in corrosion resistance in chloride aqueous environments, as determined by a.c. impedance studies.